Analysis of the Heat-Affected Zone and Ablation Efficiency in Terms of Burst Mode Parameters During High Power Picosecond Laser Micromachining of Metals

Sijie Zhang, Y. Shin
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Abstract

The past decade has seen a significantly increased use of high-power ultrafast lasers in micromachining applications. With the continual increase of the laser power for ultrafast lasers, an increase in the ablation rate has been brought about. However, it also created some negative effects, such as the heat-affected zone (HAZ) and thermal damages, which hardly occur at lower power. This issue was reported in the literature but has not been systematically addressed by previous research. This paper presents a systematic study on using the burst mode ablation to limit the HAZ while maintaining a high ablation efficiency using a high-power industrial picosecond laser with burst fluence larger than 10 J/cm2. An extended three-dimensional two-temperature model (3D-TTM) was employed to study the mechanism of the HAZ development and to predict the ablation efficiency with experimental validation. The essentiality of including the lattice heat conduction to predict accurate HAZ was discussed. The effect of the number of pulses per burst and pulse to pulse separation time was investigated. The optimal number of pulses per burst was obtained by using the 3D-TTM for copper and stainless steel. The 3D-TTM suggested that by using the optimal number of pulses per burst, a maximum reduction of 77% and 61% in HAZ could be achieved for copper and stainless steel respectively. And the corresponding ablation efficiency will be increased by 24% and 163% for copper and stainless steel at the same time. This study showed that burst mode laser machining at high fluence is an effective way of increasing efficiency while limiting the HAZ.
高功率皮秒激光金属微加工热影响区及烧蚀效率分析
在过去的十年中,高功率超快激光器在微加工应用中的应用显著增加。随着超快激光器功率的不断提高,烧蚀率也随之提高。然而,它也产生了一些负面影响,如热影响区(HAZ)和热损伤,这些在低功率下几乎不会发生。这个问题在文献中有报道,但以前的研究没有系统地解决。本文系统地研究了利用爆发模式烧蚀来限制热影响区,同时保持高烧蚀效率的方法,该方法使用的是功率大于10 J/cm2的工业皮秒激光器。采用扩展的三维双温度模型(3D-TTM)研究了热影响区形成的机理,并对烧蚀效率进行了预测,并进行了实验验证。讨论了考虑晶格热传导对准确预测热影响区的重要性。研究了脉冲数和脉冲间分离时间的影响。利用3D-TTM技术对铜和不锈钢进行了优化处理,获得了最佳脉冲数。3D-TTM表明,通过使用最佳脉冲次数,铜和不锈钢的热影响区可以分别减少77%和61%。铜和不锈钢的烧蚀效率分别提高24%和163%。研究表明,高影响度下的突发模式激光加工是提高加工效率、限制热影响区的有效途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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