Plasma deposition by a coaxial discharge in powder

H. A. El-Gamal, H. A. El-tayeb, M. A. Hassouba, M. Abdul-Moname
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引用次数: 2

Abstract

Different types of material powder have been placed at the breach of a coaxial discharge for impulse plasma deposition. The coaxial discharge is powered with a 46.26 μF, 24 kV capacitor bank. When the discharge takes place at the breach, the powder is evaporated and ionized to form a sheath of its material. The plasma sheath is ejected from the discharge zone with a high velocity to be deposited on a glass substrate. It has been found from scanning electron microscopy analysis that the deposited material is almost homogeneous for ceramic and graphite powders. The grain size is estimated to be of the order of a few microns. To measure the deposited material thickness, a microdensitometer, a laser interferometer and an optical microscope are used. It has also been found that the deposited material thickness depends on the discharge number of shots and the capacitor bank energy.
用同轴放电在粉末中沉积等离子体
不同类型的材料粉末已放置在同轴放电的缺口脉冲等离子沉积。同轴放电由46.26 μF、24 kV电容器组供电。当放电发生在缺口处时,粉末被蒸发并电离,形成其材料的护套。等离子体护套以高速从放电区喷出,沉积在玻璃基板上。通过扫描电镜分析发现,沉积的陶瓷和石墨粉末几乎是均匀的。据估计,晶粒尺寸约为几微米。为了测量沉积材料的厚度,使用了微密度计、激光干涉仪和光学显微镜。还发现,沉积材料的厚度取决于放电次数和电容器组能量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Plasma Devices and Operations
Plasma Devices and Operations 物理-核科学技术
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