A 3-D BPSG flow simulation with temperature and impurity concentration dependent viscosity model

Abstract

A BPSG flow simulation with a newly developed viscosity model is described. The viscosity model allows a 3-D BPSG flow simulation in a wide range of flow temperature and impurity concentration in the BPSG. STM observation and 3-D BPSG flow simulation using this viscosity model reveal a significant difference in the flow behavior at 850 degrees C and at 900 degrees C. The temperature dependence of the 3-D BPSG flow behavior is clarified. It is found that the 3-D BPSG flow behavior is characterized by universal curves of the surface height using the viscosity model.<>