A Piezoelectric Resonant Accelerometer for Above 140db Linear Dynamic Range High-G Applications

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808534

Seungyong Shin, A. Daruwalla, Minxiang Gong, H. Wen, F. Ayazi

{"title":"A Piezoelectric Resonant Accelerometer for Above 140db Linear Dynamic Range High-G Applications","authors":"Seungyong Shin, A. Daruwalla, Minxiang Gong, H. Wen, F. Ayazi","doi":"10.1109/TRANSDUCERS.2019.8808534","DOIUrl":null,"url":null,"abstract":"This paper reports on the design, fabrication and characterization of ultra-high linear dynamic range frequency-output resonant accelerometer with wide bandwidth utilizing a novel area-changing electrostatic frequency modulation (ACE-FM) mechanism. The accelerometer consists of a piezoelectrically-actuated free-free-beam resonator implemented in the device layer of an SOI wafer, and a high-stiffness proof-mass in the handle layer, separated from the resonator by a uniform sub-micron gap. Fabricated devices measure 850μg/√Hz VRW and 3milli-g BI with projected linear dynamic range greater than 140dB for accelerations up to 50,000g in a single-ended output configuration. Improved frequency stability can be achieved using differential outputs, which provides a path to realizing 180dB linear dynamic range in a microscale accelerometer for demanding applications including seismometers and aerospace.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"60 1","pages":"503-506"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2019.8808534","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 7

Abstract

This paper reports on the design, fabrication and characterization of ultra-high linear dynamic range frequency-output resonant accelerometer with wide bandwidth utilizing a novel area-changing electrostatic frequency modulation (ACE-FM) mechanism. The accelerometer consists of a piezoelectrically-actuated free-free-beam resonator implemented in the device layer of an SOI wafer, and a high-stiffness proof-mass in the handle layer, separated from the resonator by a uniform sub-micron gap. Fabricated devices measure 850μg/√Hz VRW and 3milli-g BI with projected linear dynamic range greater than 140dB for accelerations up to 50,000g in a single-ended output configuration. Improved frequency stability can be achieved using differential outputs, which provides a path to realizing 180dB linear dynamic range in a microscale accelerometer for demanding applications including seismometers and aerospace.

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一种用于140db以上线性动态范围高g应用的压电谐振加速度计

本文报道了利用一种新颖的变面积静电调频(ACE-FM)机制，设计、制造和表征了宽带超高线性动态范围频率输出谐振加速度计。加速度计由一个压电驱动的自由-自由光束谐振器组成，该谐振器实现在SOI晶圆的器件层中，手柄层中有一个高刚度证明质量，通过均匀的亚微米间隙与谐振器分开。制造的器件测量850μg/√Hz的VRW和3millig的BI，在单端输出配置中，加速度高达50,000g时，投影线性动态范围大于140dB。使用差分输出可以提高频率稳定性，这为在微型加速度计中实现180dB线性动态范围提供了一条途径，适用于地震仪和航空航天等要求苛刻的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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