Ying-Hsin Lu, T. Chang, Szu-Han Ho, Ching-En Chen, Jyun-Yu Tsai, Kuan-Ju Liu, X. Liu, T. Tseng, O. Cheng, Cheng-Tung Huang, Ching-Sen Lu
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{"title":"The Impact of Pre/Post-metal Deposition Annealing on Negative-Bias-Temperature Instability in HfO2 Stack p-Channel Metal-Oxide-Semiconductor Field Effect Transistors","authors":"Ying-Hsin Lu, T. Chang, Szu-Han Ho, Ching-En Chen, Jyun-Yu Tsai, Kuan-Ju Liu, X. Liu, T. Tseng, O. Cheng, Cheng-Tung Huang, Ching-Sen Lu","doi":"10.1149/2.0031508SSL","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11423,"journal":{"name":"ECS Solid State Letters","volume":"25 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2015-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ECS Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.0031508SSL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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