MEMS fingerprint sensor with arrayed cavity structures

N. Sato, K. Machida, H. Morimura, S. Shigematsu, K. Kudou, M. Yano, H. Kyuragi
{"title":"MEMS fingerprint sensor with arrayed cavity structures","authors":"N. Sato, K. Machida, H. Morimura, S. Shigematsu, K. Kudou, M. Yano, H. Kyuragi","doi":"10.1109/IEDM.2001.979661","DOIUrl":null,"url":null,"abstract":"We propose a MEMS (Micro Electro Mechanical Systems) fingerprint sensor whose pixels have novel cavity structures. Each cavity structure has a sensitive plane of a thin film on top, and a sensing circuit below it. Ridges on a finger surface bend the thin film mechanically, which is detected by the sensing circuit electronically. We fabricated the sensor using a CMOS compatible process with our sealing technique. The sensor can obtain fingerprint images of even dry or wet fingers. It also shows sufficient mechanical strength against finger pressure. These results confirm that the MEMS fingerprint sensor has the potential for wide practical application.","PeriodicalId":13825,"journal":{"name":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","volume":"15 1","pages":"41.2.1-41.2.4"},"PeriodicalIF":0.0000,"publicationDate":"2001-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2001.979661","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

Abstract

We propose a MEMS (Micro Electro Mechanical Systems) fingerprint sensor whose pixels have novel cavity structures. Each cavity structure has a sensitive plane of a thin film on top, and a sensing circuit below it. Ridges on a finger surface bend the thin film mechanically, which is detected by the sensing circuit electronically. We fabricated the sensor using a CMOS compatible process with our sealing technique. The sensor can obtain fingerprint images of even dry or wet fingers. It also shows sufficient mechanical strength against finger pressure. These results confirm that the MEMS fingerprint sensor has the potential for wide practical application.
具有阵列空腔结构的MEMS指纹传感器
提出了一种基于MEMS(微机电系统)的指纹传感器,其像素具有新颖的空腔结构。每个腔体结构的顶部有一个薄膜的敏感平面,其下面有一个传感电路。手指表面的脊状物机械地弯曲薄膜,这由传感电路以电子方式检测。我们使用CMOS兼容工艺与我们的密封技术制造传感器。该传感器可以获得干燥或潮湿手指的指纹图像。它也显示出足够的机械强度抵抗手指压力。这些结果证实了MEMS指纹传感器具有广泛的实际应用潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信