Optimization of wiregrid polarizers for CO2 laser

P. Logofatu, D. Apostol, A. Dinescu, R. Muller, D. Cristea
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Abstract

Metallic gratings (wiregrids) can function as efficient polarizers with high extinction ratio. The polarizing effect is due to the fact that these gratings act as a metal for the polarization parallel to the lines, reflecting most of it and absorbing the rest, and as a dielectric for the polarization perpendicular to the lines, transmitting profusely. A short semi-intuitive explanation of this behavior is given. A wiregrid polarizer for the CO2 lasers is designed and then the parameters of the grating that can be varied - according to the specifics of the available lithographic procedure - are optimized. The sets of optimum polarizer parameters together with the corresponding performances are listed and discussed from a practical point of view.
CO2激光器用线栅偏振器的优化设计
金属光栅(线栅)具有高消光比的高效偏振器功能。偏振效应是由于这些光栅作为平行于线的偏振的金属,反射大部分,吸收其余的,作为垂直于线的偏振的电介质,大量传输。对这种行为给出了简短的半直观的解释。设计了一种用于CO2激光器的线栅偏振器,然后根据可用光刻工艺的具体情况对光栅的参数进行了优化。从实际应用的角度出发,对最佳偏振器参数集及其性能进行了讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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