{"title":"Vertically Aligned Carbon Nanotubes for Fast Humidity Sensing","authors":"Zichao Ma, Xiaoyi Wang, Lining Zhang","doi":"10.1109/NEMS50311.2020.9265614","DOIUrl":null,"url":null,"abstract":"We report a fast-response humidity sensor fabricated using vertically aligned carbon nanotubes (CNT). The tips of CNT are intersected to form the resistive active region of the sensor, and the stem of the vertical CNT are aligned to create a clear path for moisture flow. The sensor showed a linear resistive response to relative humidity (RH) in a range of 10 % to 90 % and demonstrated the potential for real-time humidity monitoring. In transient characterizations, the sensor showed a response time of 1.9 s and a recovery time of 7.1 s to the RH of moisture flow that changes between 10 % RH and 90 % RH.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"87 1","pages":"312-315"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS50311.2020.9265614","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We report a fast-response humidity sensor fabricated using vertically aligned carbon nanotubes (CNT). The tips of CNT are intersected to form the resistive active region of the sensor, and the stem of the vertical CNT are aligned to create a clear path for moisture flow. The sensor showed a linear resistive response to relative humidity (RH) in a range of 10 % to 90 % and demonstrated the potential for real-time humidity monitoring. In transient characterizations, the sensor showed a response time of 1.9 s and a recovery time of 7.1 s to the RH of moisture flow that changes between 10 % RH and 90 % RH.