Thermally invariant all-dielectric micromirrors

LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) Pub Date : 2001-12-01 DOI:10.1109/LEOS.2001.969178

W. Liu, J. Talghader

引用次数: 0

Abstract

All-dielectric micromirrors are reported that maintain their shape to within /spl lambda//60 at 633 nm over a range of 30 C, limited by the measurement apparatus. In tandem with the experimental results, thermally invariant coating design is discussed along with thermal expansion results from some common dielectric coating materials.

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热不变全介电微镜

据报道，受测量仪器的限制，在30℃的范围内，在633 nm处，全介电微镜的形状保持在/spl λ //60以内。结合实验结果，结合常用介质涂层材料的热膨胀结果，讨论了热不变涂层的设计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)

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