Recent advances in III–V compounds on silicon

M. Razeghi
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引用次数: 8

Abstract

The performance of photonic and electronic devices fabricated with III–V compounds on silicon substrate has advanced to the degree that this technology may be considered for device applications. In this paper, the recent advances on the growth, characterization, and applications of III–V compounds on Si substrates using low pressure metalorganic chemical vapor deposition growth technique are presented.

硅基III-V类化合物的研究进展
在硅衬底上用III-V化合物制备的光子和电子器件的性能已经提高到可以考虑将该技术用于器件应用的程度。本文综述了利用低压金属有机化学气相沉积技术在Si衬底上生长III-V化合物、表征及其应用的最新进展。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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