Active liquid aspiration and dispensing based on an expanding PDMS composite

B. Samel, P. Griss, G. Stemme
{"title":"Active liquid aspiration and dispensing based on an expanding PDMS composite","authors":"B. Samel, P. Griss, G. Stemme","doi":"10.1109/MEMSYS.2007.4433160","DOIUrl":null,"url":null,"abstract":"In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"565-568"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.
基于扩展PDMS复合材料的主动液体抽吸和分配
在这项工作中,我们提出了一种基于一次性热膨胀PDMS复合材料的液体抽吸和分配装置的开发。复合致动器由可膨胀的微球组成,并结合到PDMS矩阵中,并允许通过单独寻址的集成加热器局部改变其地形。器件的设计是为了通过复合致动器的膨胀来产生空腔,并且完全由低成本材料制造,仅使用晶圆级工艺。所制备的装置成功地演示了控制液体吸入和释放,此后液体体积范围为180至815 nl。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信