Process Development of 4-Die Stack Module Using Moldable Underfill

S. Chong, Hongyu Li, Ling Xie, S. Lim, Zhaohui Chen
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引用次数: 2

Abstract

Market is always looking for way to reduce the cost of package. Traditional way of protecting the fragile micro-bumps is by applying capillary underfill (CUF) to mitigate the issue of CTE mismatch between the die and the substrate. However, the use of CUF introduce additional assembly process on top of high material cost as compared to Moldable Underfill (MUF). In this paper, we explore the use of MUF for the 4-diue stack. MUF is very attractive as it combined the step of molding and underfilling into one single step in addition to the low material cost as compared to CUF. The reliability of MUF is much superior to CUF as shown in the simulation study. The simulation study indicates a drastic 1.65 times more fatigue life for MUF as compared to CUF. The 4 die stack is formed using conventional mass reflow process. The dies is stacked on top of each other on a bottom substrate wafer using conventional noclean flux. The whole substrate wafer with the 4 die stack is then send through a reflow oven to form the solder interconnect for all 4 die stacks. This approach is much prefer than individual thermo-compression process in terms of throughput and less thermal loading to the solder interconnects as no heat is applied to each die stacking process. We had demonstrated no void in the region between the solder bump after the MUF molding process.
可模压下填料四模堆模的工艺开发
市场总是在寻找降低包装成本的方法。保护易碎微凸点的传统方法是采用毛细管下填充(CUF)来减轻模具和基板之间CTE不匹配的问题。然而,与可塑底填料(MUF)相比,使用CUF在高材料成本的基础上引入了额外的装配过程。在本文中,我们探讨了在4双线程堆栈中使用MUF。MUF非常有吸引力,因为它将成型和下填充步骤结合为一个步骤,而且与CUF相比材料成本低。仿真研究表明,MUF的可靠性大大优于CUF。仿真研究表明,MUF的疲劳寿命是CUF的1.65倍。采用常规的质量回流工艺形成四模堆。这些晶片是用传统的核电通量在衬底晶片上堆叠在一起的。然后将具有4个芯片堆的整个基板晶圆通过回流炉,形成所有4个芯片堆的焊料互连。就吞吐量而言,这种方法比单独的热压缩工艺要好得多,并且焊料互连的热负荷更少,因为每个模具堆叠过程都没有施加热量。我们已经证明了在MUF成型过程后,焊料凸起之间的区域没有空洞。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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