Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474170

J. Lee, S. Pyo, M.-O Kim, T. Chung, H. Lee, S.-C Lim, J. Park, J. Kim

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引用次数: 5

Abstract

We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

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基于集成碳纳米管接触电阻的柔性触觉传感器研制

我们开发了一种基于垂直排列碳纳米管的新型三维触觉传感器。在硅微结构上直接合成碳纳米管，并将这些碳纳米管集成到柔性聚二甲基硅氧烷层上。每个触觉传感器有四个传感部分，通过监测每个传感部分电阻的增减来检测力的方向。实验验证了该传感器的测量系数高达272，响应速度小于10 ms。在15 mN的重复力输入18万次后，接触电阻偏差比初始值变化小于3%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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