表面処理したアルミニウム合金のガス放出特性—開発した測定装置の性能評価とガス放出速度測定—;表面処理したアルミニウム合金のガス放出特性—開発した測定装置の性能評価とガス放出速度測定—;Outgassing Properties of Aluminum Alloy with Surface Treatment —Performance Assessment of Developed Measurement System and Outgassing Rate Measurement—

Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI:10.3131/JVSJ2.60.450

Naoki Ogawa, Koji Yokoyama, Hidenobu Teraoka, Takashi Ishii, K. Harima, M. Goto, Ryouji Kittaka

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引用次数: 1

Abstract

Hiroshima 720  2104, Japan ( Received November 27, 2016, Accepted August 20, 2017 ) We developed an outgassing measurement system which can measure by two methods ``Switching Between Two Pumping Paths method'' and ``Throughput method''. As a result of calibrating the two vacuum gauges on the upstream side of the sample ‰ow path and the blank ‰ow path, we obtained the calibration factor of 9.33 × 10 － 1 and 9.68 × 10 － 1 which the quantitative accuracy ( conˆdence level 95 ) is less than 14  . The ultimate pressure after baking at 150 ° C for 64 hours reached 5.0 × 10 － 8 Pa. As a result, the detection lower limit of the system was 5 × 10 － 12 Pa m 3 s － 1 . For an aluminum alloy sample exposed to an atmosphere of RH 50  , the outgassing rate after 20 hours was

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表面处理铝合金的气体释放特性-所开发的测量设备性能评价及气体释放速度测量-;表面处理铝合金的气体释放特性-所开发的测量设备性能评价及气体释放速度测量-;Outgassing Properties of Aluminum Alloy with Surface Treatment - Performance Assessment of DevelopedMeasurement System and Outgassing Rate Measurement

广岛7202104，日本(2016年11月27日收，2017年8月20日收)我们开发了一种放气测量系统，该系统可以通过两种方法进行测量:“两泵路切换法”和“吞吐量法”。对样品‰‰径和空白‰‰径上游的两个真空计进行了标定，得到了校正因子为9.33 × 10 - 1和9.68 × 10 - 1，定量精度(置信水平95)小于14。在150℃下烘烤64小时后的极限压力达到5.0 × 10 - 8pa。结果表明，该系统的检测下限为5 × 10 - 12 Pa m 3s - 1。对于暴露在RH 50气氛中的铝合金样品，20小时后的放气速率为

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Journal of The Vacuum Society of Japan

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