Compact Sensor on the Basis of the “Silicon on Isolator” Waveguide Structure for Express Detecting of Ammonia Solutions

Abstract

Now great interest to optical methods of detection of the liquid and gaseous substances especially harmful and dangerous to the person, for example, of ammonia is marked. One of the perspective directions of implementation of these methods is the thin-film SOI (silicon on insulator) technology, in particular, application of the waveguide structures as a sensor element. Interest in such devices is caused by a row of their advantages. The SOI waveguide structures thank to the properties (excellent optical characteristics, miniaturization, firmness in hostile environment) give qualitatively new opportunities for optical methods of detection of liquid and gaseous substances in a broad range of applications. In this paper the possibility of implementation of selective detection of liquid ammonia on the basis of the heterogeneous quasi single-mode SOI waveguide structures by means of a diffraction grating element is discussed.