Effect of photon irradiation on SBT films

装备机械 Pub Date : 2001-12-01 DOI:10.1109/ISEIM.2001.973761

T. Ito, H. Nonaka, Y. Ohki, K. Seol, I. Choi, Yong-Tea Kim

引用次数: 0

Abstract

Simultaneous laser irradiation during thermal annealing is effective to lower the crystallization temperature of the perovskite structure. However, the surface of a Sr/sub 2/Bi/sub 2/Ta/sub 2/O/sub 9/ (SBT) film with the perovskite structure obtained by laser irradiation is not as smooth as one obtained by thermal annealing. In order to fabricate SBT films that can be used for ferroelectric memories, we need to reduce the surface damage. In the present research, the effect of photon irradiation on the surface damage of SBT is investigated.

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光子辐照对SBT薄膜的影响

热退火过程中激光同步照射可有效降低钙钛矿结构的结晶温度。然而，激光辐照得到的具有钙钛矿结构的Sr/sub 2/Bi/sub 2/Ta/sub 2/O/sub 9/ (SBT)薄膜表面不如热退火得到的薄膜光滑。为了制造可用于铁电存储器的SBT薄膜，我们需要减少表面损伤。本文研究了光子辐照对SBT表面损伤的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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装备机械

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