Aging Characteristics of Green Mold Compound for Use in Encapsulation of Microelectronic Devices

S. Manoharan, C. Patel, S. Dunford, C. Morillo, P. McCluskey
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引用次数: 9

Abstract

Epoxy mold compounds can exhibit changes in material properties with aging at high temperature, that can significantly affect reliability of interconnects. This study focuses on characterizing elastic modulus, coefficient of thermal expansion and glass transition temperature for epoxy 'green' mold compounds, on un-aged and devices that were aged at maximum dwell temperature of 185°C. This study involves using commercial devices unlike other studies presented in literature where lab cured specimen were used. Characterization of mold compound on commercially available packages molded in production line gives valuable information but is challenging due to geometrical constraints. Hence, conventional techniques, such as DMA, cannot be used to obtain properties of mold compound in packaged devices. Thus, majority of the work is done with nanoindentation and thermomechanical analyzer (TMA). Additionally, the mechanism of aging due to oxidation is discussed and growth constant and activation energies for oxidized layer are provided.
微电子器件封装用绿模复合材料的老化特性
环氧模具化合物在高温下会随着老化而发生材料性能的变化,这将显著影响互连的可靠性。本研究的重点是表征环氧“绿色”模具化合物的弹性模量、热膨胀系数和玻璃化转变温度,在未老化和在最高停留温度185℃下老化的设备上。本研究涉及使用商业设备,不像文献中其他研究中使用实验室固化标本。在生产线上模制的商用包装上的模具化合物的表征提供了有价值的信息,但由于几何限制而具有挑战性。因此,传统的技术,如DMA,不能用于获得封装器件中模具化合物的特性。因此,大部分工作是用纳米压痕和热机械分析仪(TMA)完成的。讨论了氧化老化的机理,给出了氧化层的生长常数和活化能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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