Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation

Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena Pub Date : 2021-08-18 DOI:10.1116/6.0001084

C. Bessouet, S. Lemettre, Charlotte Kutyla, A. Bosseboeuf, P. Coste, T. Sauvage, H. Lecoq, Olivier Wendling, A. Bellamy, Piyush Jagtap, S. Escoubas, C. Guichet, O. Thomas, J. Moulin

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引用次数: 2

Abstract

Yttrium, titanium, and yttrium-titanium getter thin films were elaborated on silicon by coevaporation in ultrahigh vacuum. Y-Ti films exhibit nanometric crystallites size (18–35 nm) leading to a very high grain boundary density, which is a favorable microstructure for activation at low temperature. The yttrium content in Y-Ti alloys influences grain size, resistance against room temperature oxidation, and gettering performance for oxygen. Y-Ti films with an yttrium content higher than 30% show strong oxygen sorption during annealing at low temperature (<300 °C). After 1 h of annealing at 250 °C, it was estimated that the yttrium-based getter films can trap between 0.2 and 0.5 μmol of oxygen per cm2, while no oxygen sorption was detected for a single metal titanium film. This makes Y-Ti getter alloys attractive candidates for the packaging of MEMS under vacuum with a low bonding temperature.

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钇和钇钛吸气剂薄膜氧化的电子束和离子束分析

采用超高真空共蒸发的方法在硅上制备了钇、钛和钇钛吸气剂薄膜。Y-Ti薄膜具有纳米级晶粒尺寸(18-35 nm)，晶界密度非常高，这是低温活化的有利微观结构。Y-Ti合金中钇的含量影响合金的晶粒尺寸、抗室温氧化性能和对氧的吸附性能。钇含量大于30%的Y-Ti薄膜在低温(<300℃)退火过程中表现出较强的吸氧性。在250℃下退火1 h后，估计三氧化基吸气剂膜每cm2能捕集0.2 ~ 0.5 μmol的氧，而单金属钛膜没有捕集氧。这使得Y-Ti吸气合金成为MEMS真空低键合温度封装的有吸引力的候选者。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

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