A Zero Standby Power MEMS Switch-based Infrared Sensor with Frequency Output

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI:10.1109/IFCS-ISAF41089.2020.9234827

Vageeswar Rajaram, Sungho Kang, S. Calisgan, Antea Risso, Z. Qian, M. Rinaldi

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Abstract

This paper reports on the first demonstration of an Infrared (IR) sensor based on a micromechanical photoswitch (MP) with frequency-based IR power measurement capability. By leveraging the event-driven narrowband infrared (IR) sensing capability of an MP and an integrated thermal feedback mechanism, we show for the first time a zero standby power IR sensor that can not only detect above-threshold IR power levels (> 600 nW), but also generate a pulse waveform whose frequency (range: 0.58 Hz to 5.34 Hz) is a function of the incident IR power level. The unique capability of zero power detection and variable AC waveform generation from a DC input signal (IR radiation) without additional electronics paves the way for a new class of long-lasting, maintenance-free microdevices with potential applications in large-scale remote IoT sensor networks, biomedical implants and microrobotics.

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基于零待机功率MEMS开关的频率输出红外传感器

本文报道了基于微机械光开关(MP)的红外传感器的首次演示，该传感器具有基于频率的红外功率测量能力。通过利用MP的事件驱动窄带红外(IR)传感能力和集成热反馈机制，我们首次展示了零待机功率红外传感器，该传感器不仅可以检测高于阈值的红外功率电平(> 600 nW)，而且还可以产生频率(范围:0.58 Hz至5.34 Hz)的脉冲波形，其频率是入射红外功率电平的函数。零功率检测和直流输入信号(红外辐射)产生可变交流波形的独特能力，无需额外的电子设备，为新型持久、免维护的微型设备铺平了道路，这些设备在大规模远程物联网传感器网络、生物医学植入物和微型机器人中具有潜在的应用前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

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