Comparative analysis of materials for the design of a highly sensitive capacitive type of MEMS pressure sensor

Abstract

MEMS Comb drive type capacitive pressure sensor with high sensitivity can be used in many applications like Aerospace, Automobile, Bio MEMS, etc. This Paper is focused on the review of various types of MEMS Materials used in capacitive pressure sensor. In this paper comparative analysis of different types of MEMS materials are presented. The principle and design of proposed MEMS Comb drive type capacitive pressure sensor is explained. The MEMS comb drive type capacitive pressure sensor is simulated using COMSOL multiphysics 4.4 version. Centre deflection or deformation of a thin diaphragm and capacitive sensitivity analysis are carried out for various types of MEMS material. The analysis is carried out for the range of pressure from 0 to 100000N/m2. Finally the comparisons of MEMS materials used in Comb drive type capacitive pressure sensor shows that Aluminum (Al) has high capacitive sensitivity about 36aF/0.1bar is obtained.