An Nb5N6 microbolometer THz camera

Abstract

This article mainly introduces our research group’s latest progress in THz camera. Nb5N6 film is a THz sensitive material and has a significant prospect in THz detection. We use this material to fabricate an antenna coupled microbolometer THz detector array at room temperature, and integrated 180 nm CMOS process readout circuit. The THz camera has a resolution of 32×32, pixel size of 250×250 μm, frame rate of 30, working range is 0.25-1 THz. Compared with the type of pyro-electric infrared camera, below 1 THz terahertz spectrum has significant advantages, with a higher response rate and a lower NEP.