Three-dimensional magneto-optic near-field mapping over 10-50 /spl mu/m-scale line and space circuit patterns

Abstract

We report on the first fine x-z mapping experiment of magnetic near-field distribution over fine circuit patterns. Required three-dimensional (3D) spatial resolution was brought about by utilizing the fiber-edged magneto-optic (FEMO) probe structure. The 3D mapping technique of electromagnetic fields provides more information about finer variations in the vertical (z) direction in cases of finer circuits. The electro-optic/magneto-optic (EO/MO) probing techniques are promising toward this purpose since one can take its attractive natures such as wide-bandwidth, high-sensitivity, low invasiveness, and relatively high-spatial-resolution.