Ultra-Thin Glass Based Temperature Sensor Package for High Temperature Applications

Abstract

This work focuses on the development of a silkscreen printing process to be applied for the manufacturing of sensors based on ultra-thin glass substrates. The main target of this project consists in the development of technologies for mechanical flexible electronics and sensors to be used for high temperature fuel cells application. The challenges in this application case exist in harsh environmental conditions and a very low thickness of the sensor. Sensors are required to operate at harsh environmental conditions including chemically reactive ambient and use temperatures above 400 °C. To meet the spatial requirements in fuel cells, a sensor must be thinner than 250 µm. To transfer the deposition technology and the manufacturing on Roll-2-Roll processes is another request of this project. In a first step, a temperature-sensor was designed and tested under atmospheric conditions at 450 °C. The sensor was proven to sustain functional at temperatures of up to 450 °C for test durations of 60 h. Sensors which meet the described requirements and can be manufactured cost-effectively in Roll-2-Roll processes are certainly of interest for many other areas of application.