A new design based on electro-thermally actuation for an SU-8 microgripper

Abstract

A new design for a polymeric microgripper was developed. Two microgripper with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the metallic layers.