Emergence of Glass Solutions for 5G and Heterogeneous Integration

A. Shorey, S. Nelson, D. Levy, P. Ballentine
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引用次数: 1

Abstract

Glass has been of great interest for advanced packaging and RF applications for many years. Since glass is an insulator, it provides low loss performance particularly at high frequencies in the mmWave. The low roughness and ability to form in thin and large area formats provide opportunities for fine line spacing to enable miniaturization and cost-effectiveness. The challenge to glass adoption has been to establish high volume manufacturing operations. Leveraging the Viaffirm® temporary bond process provides many advantages to enable use of existing processes to fabricate thin glass substrates. Here we describe the process and examples of how it has been used to enable manufacture of devices on thin glass substrates.
5G和异构集成玻璃解决方案的出现
多年来,玻璃一直是先进封装和射频应用的重要材料。由于玻璃是绝缘体,它提供了低损耗性能,特别是在毫米波的高频下。低粗糙度和能够形成薄而大面积的格式提供了细线间距的机会,以实现小型化和成本效益。采用玻璃的挑战是建立大批量的制造业务。利用Viaffirm®临时粘合工艺提供了许多优势,可以使用现有工艺制造薄玻璃基板。在这里,我们描述了如何使用它来实现在薄玻璃基板上制造器件的过程和示例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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