MEMS injection-locked laser

Abstract

The paper reports an injection-locked laser (ILL) device constructed by MEMS technology to provide a wavelength-stabilized laser source for atomic watches. The device mainly consists of a MEMS tunable laser and a FP laser chip using a scheme of external injection. The combination of the injection locking and the MEMS technology brings about stabilized wavelength (< /spl plusmn/0.002 nm) at a small size (3 mm /spl times/ 2 mm /spl times/ 0.6 mm); both are crucial for atomic watches.