Sol-gel derived Pb/sub 1-x/Ca/sub x/TiO/sub 3/ thin films

Abstract

A series of sol-gel derived CaTiO/sub 3/-PbTiO/sub 3/ thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550 C to 650 C. Multiple spincoating, with an intermediate firing of 400 C between coatings, was performed to obtain films up to 0.5 /spl mu/m thick. All the films were single phase perovskite after firing to 600 C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2&10/sup -9/ A/cm/sup 2/ were obtained in these films.