{"title":"Dynamic analysis of piezo-based accelerometer with asymmetric gapped cantilever array","authors":"Zhang Luo, Chaojun Liu, Shuai Yu, Sheng Liu, Yong Xu","doi":"10.1109/ICEPT.2016.7583346","DOIUrl":null,"url":null,"abstract":"This paper focuses on the dynamic analysis of a novel piezo-based accelerometer with asymmetric gapped cantilever array. The accelerometer with asymmetric gapped cantilever, firstly published in Xu's work, exhibits significantly improved sensitivity. In this paper, in order to achieve wider dynamic response range, new structure of the accelerometer is proposed with asymmetric gapped cantilever array.","PeriodicalId":6881,"journal":{"name":"2016 17th International Conference on Electronic Packaging Technology (ICEPT)","volume":"107 1","pages":"1230-1234"},"PeriodicalIF":0.0000,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 17th International Conference on Electronic Packaging Technology (ICEPT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT.2016.7583346","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper focuses on the dynamic analysis of a novel piezo-based accelerometer with asymmetric gapped cantilever array. The accelerometer with asymmetric gapped cantilever, firstly published in Xu's work, exhibits significantly improved sensitivity. In this paper, in order to achieve wider dynamic response range, new structure of the accelerometer is proposed with asymmetric gapped cantilever array.