Jeong-Soo Lee, A. Chandrashekar, K. Parikh, K. Cattanach, S. K. Manohar, G. Lee, L. Overzet
{"title":"Multiwall carbon nanotubes grown on a four-probe patterned catalyst layer for chemical sensor applications","authors":"Jeong-Soo Lee, A. Chandrashekar, K. Parikh, K. Cattanach, S. K. Manohar, G. Lee, L. Overzet","doi":"10.1109/SENSOR.2005.1497479","DOIUrl":null,"url":null,"abstract":"The fabrication and the application of aligned multi-wall carbon nanotubes (MWNTs) grown on a four-probe patterned catalyst layer for the detection of chemical vapors are reported. The temperature resistance results show that the aligned MWNTs are semiconducting and follow the 3-dimensional hopping conduction mechanism. Effects of oxygen plasma on the characteristics of the MWNTs are also investigated. The four-probe MWNTs devices show resistance changes with exposure to gas vapors and that correlate with solvent polarity parameters. Those results suggest that our four-probe MWNTs devices are promising for chemical sensor applications.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"121 1","pages":"1943-1946 Vol. 2"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1497479","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The fabrication and the application of aligned multi-wall carbon nanotubes (MWNTs) grown on a four-probe patterned catalyst layer for the detection of chemical vapors are reported. The temperature resistance results show that the aligned MWNTs are semiconducting and follow the 3-dimensional hopping conduction mechanism. Effects of oxygen plasma on the characteristics of the MWNTs are also investigated. The four-probe MWNTs devices show resistance changes with exposure to gas vapors and that correlate with solvent polarity parameters. Those results suggest that our four-probe MWNTs devices are promising for chemical sensor applications.