Stretchable Wavy Piezoelectric Sensor Fabricated by Micro-Corrugation Process

Abstract

We developed a micro-corrugation process to fabricate a vertically wavy thin film piezoelectric sensor for highly stretchable human motion sensors. Wavy structure is formed by micro-corrugation process where thin functional film is bent with gears. A continuous wavy structured polyvinylidene difluoride film with 600-µm pitch and 140-µm height was successfully fabricated. The fabricated sensor sustains 15% strain and successfully detects the bending motion of the human finger.