Production of silicon carbide nanoparticles by spray pyrolysis from femtoliter droplets of chlorotrimethylsilane

Abstract

For the first time, silicon carbide nanoparticles were obtained by spray pyrolysis of chlorotrimethylsilane droplets in an aerosol reactor with argon flow. It was shown that with an increase in the reactor wall temperature to 1100 °C, the sample purity degree grows, and the average size of the nanoparticles is 6-40 nm.