Charge sensing of a Si triple quantum dot system using single electron transistors

Abstract

We fabricate a serial triple quantum dot (TQD) system, which is made on a silicon-on-insulator (SOI) wafer by dry etching and integrated with single electron transistors (SETs) as charge sensors. We observe charge transitions of a dot in the TQD in the characteristic of the charge sensor which is the furthest to the dot. It implies a SET charge sensor has a capability of sensing of all the charge transitions in TQD.