MAGNETRON SPUTTER DEPOSITION OF TUNGSTEN COATINGS IN DEUTERIUM-HELIUM MIXTURES

IF 1.6 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

High Temperature Materials and Processes Pub Date : 2023-01-01 DOI:10.1615/hightempmatproc.v27.i4.30

M. Kharkov, G.S. Lomonosov, D. Kolodko, M. Kukushkina, A. Kaziev, A. Tumarkin, O. Ogorodnikova

引用次数: 0

Abstract

The electrical parameters of a high-power impulse magnetron sputtering (HiPIMS) discharge operating in H2/He mixtures were studied using different values of the pulse width, repetition frequency, and power. Deposition of tungsten (W) coatings was carried out in a magnetron discharge with a thermally insulated W target in two regimes at different pulse widths (80 and 500 µs) and frequencies (2 and 0.5 kHz). The average discharge power was fixed at Pd = 1500 W. Fusion-relevant molecular deuterium/helium (He) and hydrogen/He gas mixtures with a 90/10 flow ratio were used in the experiments.

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磁控溅射沉积氘氦混合物中钨涂层

研究了H2/He混合物中不同脉冲宽度、重复频率和功率下的高功率脉冲磁控溅射放电的电学参数。在不同的脉冲宽度(80µs和500µs)和频率(2和0.5 kHz)下，用磁控管放电对钨(W)涂层进行了沉积。平均放电功率固定在Pd = 1500w。实验采用与聚变相关的分子氘/氦(He)和氢/氦气体混合物，流动比为90/10。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

High Temperature Materials and Processes 工程技术-材料科学：综合

CiteScore

2.50

自引率

0.00%

发文量

审稿时长

3.9 months

期刊介绍： High Temperature Materials and Processes offers an international publication forum for new ideas, insights and results related to high-temperature materials and processes in science and technology. The journal publishes original research papers and short communications addressing topics at the forefront of high-temperature materials research including processing of various materials at high temperatures. Occasionally, reviews of a specific topic are included. The journal also publishes special issues featuring ongoing research programs as well as symposia of high-temperature materials and processes, and other related research activities. Emphasis is placed on the multi-disciplinary nature of high-temperature materials and processes for various materials in a variety of states. Such a nature of the journal will help readers who wish to become acquainted with related subjects by obtaining information of various aspects of high-temperature materials research. The increasing spread of information on these subjects will also help to shed light on relevant topics of high-temperature materials and processes outside of readers’ own core specialties.