Piezoelectric and pyroelectric microsystems based on ferroelectric thin films

Abstract

The paper reviews different aspects of deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for application in ultrasonic micromotors and pyroelectric infra-red detectors. The deposition of such films and the principal processes for their integration onto silicon substrates are fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes.