Comparitive analysis of capacitive type MEMS pressure sensor for altitude sensing

新能源 Pub Date : 2014-12-01 DOI:10.1109/NCETNRESEM.2014.7088766

P. Maniraman, L. Chitra

引用次数: 8

Abstract

This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are discussed. Also a new design is proposed to overcome the demerits of capacitive sensor.

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电容式MEMS压力传感器海拔测量的比较分析

本文对几种基于MEMS的电容式压力传感器进行了比较、选择、设计和仿真。在0-1.1 MPa(兆帕斯卡)压力范围内，通过模拟电容式压力传感器的膜片偏转、电容变化等，分析了目前广泛应用的电容式压力传感器，并讨论了其优缺点。针对电容式传感器的缺点，提出了一种新的设计方案。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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