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PULSE RADIOLYSIS STUDIES ON THE MECHANISM OF THE HIGH SENSITIVITY OF CHLOROMETHYLATED POLYSTYRENE AS AN ELECTRON NEGATIVE RESIST.

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry Pub Date : 1984-12-01 DOI:10.1021/bk-1984-0266.ch005
Y. Tabata, S. Tagawa, M. Washio
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American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
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