Synthesis and Characterization of Screen Printed Zn0.97Cu0.03O Thick Film for Semiconductor Device Applications

R. Zargar, S. D. Khan, M. Khan, M. Arora, A. K. Hafiz
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引用次数: 12

Abstract

The studies on doped ZnO thick films deposited over large surface area are still a very promising area of research and development. We report characteristic properties of thick film of Zn0.97Cu0.03O prepared by the economic screen printing technique. The film was characterized by XRD, SEM, diffused reflectance, FTIR, and dark resistivity measurement techniques. The XRD and SEM studies revealed polycrystalline, single phase, porous, and granular surface morphology of this Cu doped ZnO thick films. The direct band gap energy of this film determined by diffuse reflectance technique is 3.18 eV. IR transmission spectrum measured in 4000–600 cm−1 region at ambient temperature confirmed the incorporation of Cu2
半导体器件用丝网印刷zn0.97 cu0.030厚膜的合成与表征
在大表面积上沉积掺杂ZnO厚膜的研究仍然是一个非常有前途的研究和发展领域。报道了采用经济丝网印刷技术制备的zn0.97 cu0.030厚膜的特征性能。采用XRD、SEM、漫反射、FTIR、暗电阻率等测试手段对薄膜进行了表征。XRD和SEM研究表明,该Cu掺杂ZnO厚膜的表面形貌为多晶、单相、多孔和颗粒状。漫反射法测定该薄膜的直接带隙能为3.18 eV。室温下4000 ~ 600 cm−1区域的红外透射光谱证实了Cu2的掺入
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