Analysis of Aluminum Nitride Resonators and Filters Over Temperature and Under High Power

Abstract

This paper presents an experimental investigation of the performance of Aluminum Nitride (AlN) on Silicon resonators operating over a wide temperature range. The resonators are measured over the temperature range of -196°C to +120°C. Linear and nonlinear characterization of the proposed resonator is presented over an input power range from 8dBm to 20dBm. The paper also presents measured results of a 3-pole band-pass filter designed using such type of resonators.