Microwave-Driven CPW Microplasma Generator for Low-Power Discharge

Abstract

A novel microplasma generator based on a halfwavelength grounded coplanar waveguide is introduced. Design theory and considerations as well as simulation results are presented. Measured results of a fabricated circuit are compared with simulations. Sustained microplasma glow discharges are achieved in sub-atmospheric pressure argon with sustained input powers of less than 400 mW. The excitation frequency dependence of the discharge location is also investigated, and its implication for future designs is discussed.