Hair-Like Nanostructure Based Ion Detector by 16nm FinFET Technology

Abstract

A novel hair-like nanostructure incorporated a floating gate Ion-Sensitivities Field Effect Transistor (ISFET) is demonstrated for the first time. With its corresponding readout circuit embedded by 16nm FinFET technology, the proposed ion detector features high sensitivity and wide/adjustable dynamic range. Additionally, real-time detection of both pH level and sodium ion concentration on liquid samples is verified, while their noise analysis for robust and stable reading is performed.