{"title":"Memory Packaging Challenges for a Growing Market","authors":"Knowlton Olmstead, C. Zwenger, R. Strode","doi":"10.4071/1085-8024-2021.1.000207","DOIUrl":null,"url":null,"abstract":"\n Increasing demands for storage and high-performance memory in applications such as artificial intelligence (AI), machine learning and processing storage are driving long-term growth in the market. This paper will highlight the key challenges encountered in packaging next-generation memory devices and discuss some of the technological developments required to address them while considering performance, cost, and yield. An evaluation is highlighted of a remote microwave plasma process to remove damage caused by laser ablation during the wafer dicing process that shows an improvement in die strength using this process.","PeriodicalId":14363,"journal":{"name":"International Symposium on Microelectronics","volume":"27 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/1085-8024-2021.1.000207","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Increasing demands for storage and high-performance memory in applications such as artificial intelligence (AI), machine learning and processing storage are driving long-term growth in the market. This paper will highlight the key challenges encountered in packaging next-generation memory devices and discuss some of the technological developments required to address them while considering performance, cost, and yield. An evaluation is highlighted of a remote microwave plasma process to remove damage caused by laser ablation during the wafer dicing process that shows an improvement in die strength using this process.