High performance miniaturized NEMS sensors Toward co-integration with CMOS?

Abstract

In this paper, we will present some possible emerging applications for Nano-Electro-Mechanical Systems (NEMS) and the interest of their co-integration with CMOS. We will compare some integration schemes and present mass sensing as a possible emerging application. In particular, experimental results on complex gas measurements with NEMS will be introduced. We will show that multi-physics simulations and compact modelling of NEMS components (including chemical and physical effects) can be efficiently used in circuit simulations standard tools for such system optimization.