MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Abstract

This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.