S. Huang, Yen‐Ju Wu, H. Lin, S. F. Li, Y. J. Chen, Cheng‐Yi Liu
{"title":"Etching Three-Dimensional Pattern on Sapphire Substrate by Dynamic Self-Masking Alunogen Compound","authors":"S. Huang, Yen‐Ju Wu, H. Lin, S. F. Li, Y. J. Chen, Cheng‐Yi Liu","doi":"10.1149/2.0051506SSL","DOIUrl":null,"url":null,"abstract":"Maskless H2SO4 wet-etching on sapphire substrates creates three-dimensional pyramidal pattern on sapphire surface. Alunogen self-forming mask grows in H2SO4 etching generating a dynamic self-masking action, which fabricates 3-dimensional pyramidal pattern on the etched sapphire wafers. The slope and size of the pyramids are controlled by rate ratio (k) between alunogen growth rate and c-plane etching rate. Constant k results in flat facet side-planes of sapphire pyramids and varying k in etching produce curved side-planes of the sapphire pyramid. © The Author(s) 2015. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY, http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in any medium, provided the original work is properly cited. [DOI: 10.1149/2.0051506ssl] All rights reserved.","PeriodicalId":11423,"journal":{"name":"ECS Solid State Letters","volume":"13 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2015-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ECS Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.0051506SSL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
动态自掩蔽铝原化合物在蓝宝石衬底上蚀刻三维图案
在蓝宝石衬底上无掩膜H2SO4湿法蚀刻可在蓝宝石表面形成三维锥体图案。在H2SO4蚀刻中生长Alunogen自形成掩膜,产生动态自掩蔽作用,在蚀刻的蓝宝石晶片上形成三维锥体图案。金字塔的斜率和大小由铝原生长速率和c面蚀刻速率之间的比率(k)控制。恒定的k会导致蓝宝石金字塔的平面侧面,而在蚀刻过程中改变k会导致蓝宝石金字塔的曲面侧面。©作者2015。由ECS出版。这是一篇基于知识共享署名4.0许可(CC BY, http://creativecommons.org/licenses/by/4.0/)的开放获取文章,该许可允许在任何媒体上不受限制地重复使用该作品,前提是正确引用原始作品。[DOI: 10.1149/2.0051506ssl]版权所有
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