Chip-Last (RDL-First) Fan-Out Panel-Level Packaging (FOPLP) for Heterogeneous Integration

J. Lau, C. Ko, C. Peng, Kai-Ming Yang, Tim Xia, P. Lin, Jean-Jou Chen, Po-Chun Huang, Tzvy-Jang Tseng, E. Lin, Leo Chang, Curry Lin, Winnie Lu
{"title":"Chip-Last (RDL-First) Fan-Out Panel-Level Packaging (FOPLP) for Heterogeneous Integration","authors":"J. Lau, C. Ko, C. Peng, Kai-Ming Yang, Tim Xia, P. Lin, Jean-Jou Chen, Po-Chun Huang, Tzvy-Jang Tseng, E. Lin, Leo Chang, Curry Lin, Winnie Lu","doi":"10.4071/imaps.1137828","DOIUrl":null,"url":null,"abstract":"\n In this investigation, the chip-last, RDL (redistribution-layer)-first, fan-out panel-level packaging (FOPLP) for heterogeneous integration is studied. Emphasis is placed on the materials, process, fabrication, and reliability of a heterogeneous integration of one large chip (10mm × 10mm) and two small chips (7mm × 5mm) by a FOPLP method on a 20mm × 20mm RDL-first substrate fabricated on a 515mm × 510mm temporary glass panel. Reliability test such as the drop test of the heterogeneous integration package on a PCB (printed circuit board) is performed and test results including failure analysis are presented. Some recommendations are also provided.","PeriodicalId":14363,"journal":{"name":"International Symposium on Microelectronics","volume":"49 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/imaps.1137828","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

In this investigation, the chip-last, RDL (redistribution-layer)-first, fan-out panel-level packaging (FOPLP) for heterogeneous integration is studied. Emphasis is placed on the materials, process, fabrication, and reliability of a heterogeneous integration of one large chip (10mm × 10mm) and two small chips (7mm × 5mm) by a FOPLP method on a 20mm × 20mm RDL-first substrate fabricated on a 515mm × 510mm temporary glass panel. Reliability test such as the drop test of the heterogeneous integration package on a PCB (printed circuit board) is performed and test results including failure analysis are presented. Some recommendations are also provided.
芯片最后(RDL-First)扇出面板级封装(FOPLP)异构集成
在本研究中,研究了异质集成的片末、RDL(再分布层)优先、扇出面板级封装(FOPLP)。重点是在515mm × 510mm临时玻璃面板上,采用FOPLP方法在20mm × 20mm RDL-first基板上实现一个大芯片(10mm × 10mm)和两个小芯片(7mm × 5mm)的异质集成的材料、工艺、制造和可靠性。进行了异质集成封装在PCB(印刷电路板)上的跌落试验等可靠性试验,并给出了包括失效分析在内的试验结果。并提出了一些建议。
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