Analytical Electron Microscopy of Silicon Nitride Nanostructures Synthesized from the Vapor Phase

Abstract

Silicon nitride, Si3N4 is a covalent compound with excellent physical and chemical properties such as corrosion resistance, low-specific weight and good thermal conductivity at ambient and elevated temperatures. Such properties are very attractive in application as advanced ceramics and in semiconductor devise [1]. Nano sized amorphous silicon nitride powders were synthesized at 300 °C by precipitation from the vapor phase reaction of SiCl4 and NH3 and Ar as carrier gas. Solid ammonium halogenide is formed as by-product, in addition to silicon nitride powder.