Optical actinometry of the N-atom density in nitrogen plasma

Abstract

Trace-rare-gas optical actinometry is used to measure the N-atom density in 50 Hz pulsed dc nitrogen plasma as functions of the discharge parameters. The excited-state population density of N atoms is extracted from their respective optical transitions and is related to the ground-state population density by considering the changes in the electron energy distribution function. This technique provides reliable information on the atomic N concentration in the gas discharge, which is vital in the synthesis of nitrides owing to its high chemical reactivity.