Design and optimization of an electrostatic actuated micromirror with isolated bottom electrode on silicon substrate

Abstract

In this paper one type of an electrostatic actuated micromirror structure was simulated using Coventorware software, taking into account the material properties and structure geometry in order to optimize the structure. A characteristic response (displacement versus voltage) for simulated structure is the hysteresis loop of displacement. By reducing the length off the bottom electrode and also the length of the upper isolating layer we can obtain larger displacement of 12 mum. The optimized mirror reflective surface has a size of 120 mum times 120 mum.