Surface Acoustic Wave Generation and Propagation on Polar Glass-Ceramic for High Temperature Sensors

Abstract

This paper presents a surface acoustic wave (SAW) device able to operate up to 900°C, based on a piezoelectric non-ferroelectric glass-ceramic containing fresnoite crystals. This material is synthesized by a classic glassmaking technique and isothermal crystallization heat treatment. Its properties are measured at high temperatures. Input and output interdigital transducers (IDT) are realized on its surface to generate and receive the SAW. It creates a temperature device working up to 800°C, that will further be modified in pressure or humidity sensors by applying the appropriate sensitive layer between the input and the output IDT.