Two-photon polymerization of femtosecond high-order Bessel beams with aberration correction

Abstract

In the femtosecond two-photon polymerization (2PP) experimental system, optical aberrations degrade the fabrication quality. To solve this issue, a multichannel interferometric wavefront sensing technique is adopted in the adaptive laser processing system with a single phase-only spatial light modulator. 2PP fabrications using corrected high-order Bessel beams with the above solution have been conducted, and high-quality microstructure arrays of microtubes with 20 μ m diameter have been rapidly manufactured. The effectiveness of the proposed scheme is demonstrated by comparing the beam intensity distributions and 2PP results before and after aberration corrections.